Totally out of date for 2010 | Silicon Processing for the VLSI Era, Vol. 1: Process Technology | Stanley Wolf, Richard N. Tauber
 
 



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Silicon Processing for the VLSI Era, Vol. 1: Process Technology







Stanley Wolf, Richard N. Tauber

Lattice Press, 1999 - 960 pages

average customer review:based on 7 reviews
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   highly recommended  highly recommended






Just overview

I don't like this series. Vol 1, 2 were used when I was in University

The series just gave you overview. It won't explain in details. You have to research on your own. Since silicon processing changes in very fast pace, these books may already be out of date (almost 4 years ago). But it is still good reference.

Basically, this book is just collection of the technical papers. I can find some articles are almost 'word by word' copied from the reference Journals and technical papers.

Neverless, it still saves a lot of time to go to the library and get the journals (This may be the only good things I can find. THe journals are not cheap. IEEE subscripts for site is over $20K. There are more than IEEE journals in these books). When I have to get journals in library, it took 'long time' to search and go to the shelf to get the journal I want.

However, I won't be very impressed in the book. As I said, this book is just summary of the reference journals. Sometimes (if not all the time), I can find the articles in the book are almost 'word by word' copied from the technical journals without any further explanation. I really doubt anyone knows the "details of physics" behind. But in the industrial, most people just trial and error, very little physics behind. I would say nobody cares too much physics, it took too much time to research and it is too difficult to keep up with new technilogies.


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Silicon Processing for the VLSI Era

"Silicon Processing for the VLSI Era" is by far the most authoritative guide to semiconductor processing and nano-fabrication in existence. Practical processing techniques as well as their underlying fundamental principles are thoroughly covered in detail. This book has been indispensable to me during my graduate education and has the solution to just about every fabrication problem I have encountered in my 5+ years of experience. I highly recommend this book to anyone who is trying to build a semiconductor device or just curious about how such things are done.


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Totally out of date for 2010

This book was for the aluminum era and is now totally out of date. Books 3 and 4 are what people should be reading and I'm sorry to say they too aren't any more near the cutting edge of technology.
If you want a book to study the historical nature of processes, then it's an amazing book, very in depth and covers most of the important processes of the time.





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THE best set of technical references in this area

In my 25 years of semiconductor process development I have never come across such a complete and in-depth collection of device and process knowledge in a single place. Years ago we needed to spend many hours with the journals to extract the requisite information to supplement our laboratory efforts. These volumes synthesize the basics with the most modern techniques now employed in advanced technologies. In addition, many subtle processing difficulties are addressed as well which will be much appreciated by the researcher. Through the years I have purchased in excess of 100 text references and none comes as close to these in the total knowledge contained within. These volumes are intended for the researchers and engineers working in this field yet they are so very well written and easy to comprehend that any one with such an interest in this field can understand them. Study these volumes completely.


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