The series just gave you overview. It won't explain in details. You have to research on your own. Since silicon processing changes in very fast pace, these books may already be out of date (almost 4 years ago). But it is still good reference.
Basically, this book is just collection of the technical papers. I can find some articles are almost 'word by word' copied from the reference Journals and technical papers.
Neverless, it still saves a lot of time to go to the library and get the journals (This may be the only good things I can find. THe journals are not cheap. IEEE subscripts for site is over $20K. There are more than IEEE journals in these books). When I have to get journals in library, it took 'long time' to search and go to the shelf to get the journal I want.
However, I won't be very impressed in the book. As I said, this book is just summary of the reference journals. Sometimes (if not all the time), I can find the articles in the book are almost 'word by word' copied from the technical journals without any further explanation. I really doubt anyone knows the "details of physics" behind. But in the industrial, most people just trial and error, very little physics behind. I would say nobody cares too much physics, it took too much time to research and it is too difficult to keep up with new technilogies.